Brian G. Willis
Professor/Chem and Biomolecular Engr
Storrs Mansfield
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Scholarly Contributions
95 Scholarly Contributions
Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
2024
Research Type: Journal Article
Low-temperature synthesis of crystalline vanadiumoxide films using oxygen plasmas
2023
Research Type: Journal Article
Atomic Layer Doped Epitaxial β-Ga2O3 Films Grown via Supercycle and Co-dosing Approaches at 240 °C
2022
Research Type: Poster/Presentation
Real-time in situ process monitoring and characterization of GaN films grown on Si (100) by low-temperature hollow-cathode plasma-atomic layer deposition using trimethylgallium and N2/H2 plasma
2021
Research Type: Journal Article
Tuning the Structural Properties of Low-Temperature Grown GaN Films via in Situ Ar-Plasma Annealing During Hollow-Cathode Atomic Layer Deposition
2021
Research Type: Poster/Presentation
Low-Temperature Plasma-ALD of Wide and Ultra-Wide Bandgap Semiconductors: Accomplishments and Hurdles to Overcome
2021
Research Type: Poster/Presentation
Hollow Cathode Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide Films: in situ Ellipsometric Monitoring of Film Growth with TEMAV and Oxygen Plasma
2021
Research Type: Poster/Presentation
Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films
2020
Research Type: Journal Article
Understanding the role of rf-power on AlN film properties in hollow-cathode plasma-assisted atomic layer deposition
2020
Research Type: Journal Article
Optical response of nickel-based superalloy Inconel-718 for applications in additive manufacturing
2020
Research Type: Journal Article
Crystalline GaN Film Growth at a Thermal Budget Approaching 100C Using Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2020
Research Type: Poster/Presentation
Understanding the Influence of In-situ Ar-Plasma Annealing Processes on the Film Properties of ALD-Grown AlN Layers
2020
Research Type: Poster/Presentation
Plasma-Enhanced ALD of as-Grown Crystalline VOx and the Evolution of its Phase Structure via Critically Tuned Post-Deposition Annealing Process
2020
Research Type: Poster/Presentation
Plasma-Assisted Atomic Layer Annealing as a Low-Temperature Technique Enabling Crystalline Growth of β-Ga2O3 Films for Wearable/Flexible Electronics
2020
Research Type: Poster/Presentation
As-Grown Crystalline beta-Ga2O3 Films via Plasma-Enhanced ALD at Low Substrate Temperatures
2020
Research Type: Poster/Presentation
Investigating the Role of N2 Plasma Composition on the Atomic Layer Growth of InN Films Using Hollow-Cathode Plasma Source
2020
Research Type: Poster/Presentation
Towards as-grown Crystalline Cubic Boron Nitride via Low-Temperature Plasma-enhanced Atomic Layer Deposition
2020
Research Type: Poster/Presentation