Brian G. Willis
Professor/Chem and Biomolecular Engr

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Scholarly Contributions

95 Scholarly Contributions

60
Poster/Presentations
29
Journal Articles
5
Conference Proceedings
1
Patent and Intellectual Property
Atomic Layer Doped Epitaxial β-Ga2O3 Films Grown via Supercycle and Co-dosing Approaches at 240 °C
2022
Brian G Willis, Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Tuning the Structural Properties of Low-Temperature Grown GaN Films via in Situ Ar-Plasma Annealing During Hollow-Cathode Atomic Layer Deposition
2021
Adnan Mohammad, Brian G Willis, John Grasso, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Research Type: Poster/Presentation

Atomic Layer Doping of β-Ga2O3 Films via Plasma Processing
2021
Adnan Mohammad, Ali K Okyay, Deepa Shukla, John Grasso, Necmi Biyikli, Brian G Willis, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Low-Temperature Plasma-ALD of Wide and Ultra-Wide Bandgap Semiconductors: Accomplishments and Hurdles to Overcome
2021
Adnan Mohammad, Necmi Biyikli, Deepa Shukla, Saidjafarzoda Ilhom, Brian G Willis
Research Type: Poster/Presentation

Hollow Cathode Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide Films: in situ Ellipsometric Monitoring of Film Growth with TEMAV and Oxygen Plasma
2021
Brian G Willis, Adnan Mohammad, Deepa Shukla, Necmi Biyikli, Barrett O Wells, Ali K Okyay, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Crystalline GaN Film Growth at a Thermal Budget Approaching 100C Using Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2020
Saidjafarzoda Ilhom, Necmi Biyikli, Brian G Willis, Adnan Mohammad, Deepa Shukla
Research Type: Poster/Presentation

Understanding the Influence of In-situ Ar-Plasma Annealing Processes on the Film Properties of ALD-Grown AlN Layers
2020
John Grasso, Brian G Willis, Ali K Okyay, Adnan Mohammad, Deepa Shukla, Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Plasma-Enhanced ALD of as-Grown Crystalline VOx and the Evolution of its Phase Structure via Critically Tuned Post-Deposition Annealing Process
2020
Deepa Shukla, Krishna D Joshi, Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad, Brian G Willis, Barrett O Wells
Research Type: Poster/Presentation

Plasma-Assisted Atomic Layer Annealing as a Low-Temperature Technique Enabling Crystalline Growth of β-Ga2O3 Films for Wearable/Flexible Electronics
2020
Deepa Shukla, Adnan Mohammad, Necmi Biyikli, Brian G Willis, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

As-Grown Crystalline beta-Ga2O3 Films via Plasma-Enhanced ALD at Low Substrate Temperatures
2020
John Grasso, Deepa Shukla, Brian G Willis, Ali K Okyay, Necmi Biyikli, Saidjafarzoda Ilhom, Adnan Mohammad
Research Type: Poster/Presentation

Investigating the Role of N2 Plasma Composition on the Atomic Layer Growth of InN Films Using Hollow-Cathode Plasma Source
2020
Saidjafarzoda Ilhom, Brian G Willis, John Grasso, Necmi Biyikli, Deepa Shukla, Adnan Mohammad, Ali K Okyay
Research Type: Poster/Presentation

Towards as-grown Crystalline Cubic Boron Nitride via Low-Temperature Plasma-enhanced Atomic Layer Deposition
2020
Adnan Mohammad, Barrett O Wells, Necmi Biyikli, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Feasibility of Boron Nitride Film Growth at Lower-than 250C Substrate Temperature via Hollow-Cathode Plasma-ALD: In-situ Monitoring of Plasma Composition Effect
2020
Necmi Biyikli, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom, Ali K Okyay, John Grasso, Adnan Mohammad
Research Type: Poster/Presentation

Impact of Operating Parameters on Precursor Separation in ‘Air Hockey’ Spatial Atomic Layer Deposition Reactor
2019
John Grasso, Brian G Willis
Research Type: Poster/Presentation

Investigating plasma influence on the crystallinity of III-nitrides films grown by plasma-assisted atomic layer deposition
2019
Adnan Mohammad, Brian G Willis, Deepa Shukla, Hamza Malik, Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Photon Enhanced Area Selective Atomic Layer Deposition on Plasmonic Nanoantennas
2019
Brian G Willis, Chengwu Zhang
Research Type: Poster/Presentation

Role of Hydrogen Radicals in the Surface Reactions of Trimethyl-Indium (TMI) with Ar/N2 Plasma in Hollow-Cathode Plasma-Assisted ALD
2019
Saidjafarzoda Ilhom, Necmi Biyikli, Deepa Shukla, Brian G Willis, Adnan Mohammad
Research Type: Poster/Presentation

Low-temperature self-limiting growth of beta-Ga2O3 films on flexible substrates via plasma-enhanced ALD
2019
Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad, Brian G Willis, Deepa Shukla
Research Type: Poster/Presentation

Understanding the Effect of Plasma Gas Chemistry and Reactor Pressure on the Crystallinity of AlN Films Grown via Plasma-Assisted Atomic Layer Deposition
2019
Deepa Shukla, Brian G Willis, Saidjafarzoda Ilhom, Adnan Mohammad, Necmi Biyikli
Research Type: Poster/Presentation

In-situ Ellipsometric Analysis of the Plasma Influence on Atomic Layer Deposited AlN Thin Films
2019
Necmi Biyikli, Saidjafarzoda Ilhom, Brian G Willis, Adnan Mohammad, Deepa Shukla
Research Type: Poster/Presentation