Necmi Biyikli
Associate Professor/Electrical and Computer Engr
Storrs Mansfield
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Scholarly Contributions
103 Scholarly Contributions
Analyzing Self-limiting Surface Reaction Mechanisms of Metal Alkyl Precursors and Nitrogen Plasma Species: Real-time In-situ Ellipsometric Monitoring of III-nitride Plasma-ALD Processes
2019
Research Type: Poster/Presentation
An Alternative Route for Low-Temperature Growth of Crystalline III-Nitride Thin Films and Nanostructures - Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2019
Research Type: Poster/Presentation