Necmi Biyikli
Associate Professor/Electrical and Computer Engr

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Scholarly Contributions

103 Scholarly Contributions

76
Poster/Presentations
26
Journal Articles
1
Conference Proceedings
Self-limiting Growth of III-nitride Materials via Hollow-cathode Plasma-ALD: Structural and Chemical Analysis
2018
Deepa Shukla, Adnan Mohammad, Necmi Biyikli
Research Type: Poster/Presentation

Multilayered Graphene Blocking/Lift-off Layers Towards Selective Plasma-ALD of III-nitride Films
2018
Necmi Biyikli, Petro Deminskyi, Ali Haider
Research Type: Poster/Presentation

Nucleation properties of ALD-grown Al2O3 on plasma-treated Au surfaces via in-situ ellipsometry
2018
Adnan Mohammad, Necmi Biyikli, Deepa Shukla
Research Type: Poster/Presentation

Real-time in-situ ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition
2019
Blaine Johs, Adnan Mohammad, Saidjafarzoda Ilhom, Brian G Willis, Deepa Shukla, Necmi Biyikli, Ali K Okyay
Research Type: Journal Article

In-situ Ellipsometric Analysis of the Plasma Influence on Atomic Layer Deposited AlN Thin Films
2019
Necmi Biyikli, Saidjafarzoda Ilhom, Brian G Willis, Adnan Mohammad, Deepa Shukla
Research Type: Poster/Presentation

Analyzing Self-limiting Surface Reaction Mechanisms of Metal Alkyl Precursors and Nitrogen Plasma Species: Real-time In-situ Ellipsometric Monitoring of III-nitride Plasma-ALD Processes
2019
Brian G Willis, Blaine Johs, Ali K Okyay, Necmi Biyikli, Deepa Shukla, Adnan Mohammad
Research Type: Poster/Presentation

Investigating the effect of plasma chemistry on the InOxNx films grown via plasma-enhanced atomic layer deposition
2019
Necmi Biyikli, Adnan Mohammad, Liam Gerety, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Inductively coupled plasma-polymerized CFx inhibition layers for selective oxide and metal deposition
2019
Necmi Biyikli
Research Type: Poster/Presentation

Low-temperature self-limiting growth of beta-Ga2O3 films on flexible substrates via plasma-enhanced ALD
2019
Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad, Brian G Willis, Deepa Shukla
Research Type: Poster/Presentation

Low-temperature Growth of Wide Bandgap Nitride and Oxide Thin Films via Plasma-assisted Atomic Layer Deposition: Influence of rf-plasma Source and Plasma Power
2019
Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad, Deepa Shukla
Research Type: Poster/Presentation

Impact of substrate and ex-situ/in-situ surface cleaning on plasma-ALD grown AlN films
2019
Adnan Mohammad, Brian G Willis, Sylvester Jung, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Research Type: Poster/Presentation

Investigating plasma influence on the crystallinity of III-nitrides films grown by plasma-assisted atomic layer deposition
2019
Adnan Mohammad, Brian G Willis, Deepa Shukla, Hamza Malik, Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Gaining insight into self-limiting surface reactions during plasma-assisted atomic layer deposition of III-nitrides via in-situ ellipsometry
2019
Ali K Okyay, Necmi Biyikli, Deepa Shukla, Saidjafarzoda Ilhom, Adnan Mohammad, Blaine Johs, Brian G Willis
Research Type: Poster/Presentation

An Alternative Route for Low-Temperature Growth of Crystalline III-Nitride Thin Films and Nanostructures - Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2019
Adnan Mohammad, Deepa Shukla, Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Investigating Plasma Parameters and Influence of Argon to the Crystallinity of GaN Films Grown by Plasma-Assisted ALD
2019
Saidjafarzoda Ilhom, Brian G Willis, Adnan Mohammad, Necmi Biyikli, Deepa Shukla
Research Type: Poster/Presentation

Atomic layer deposition for efficient and stable perovskite solar cells
2019
Deepa Shukla, Adnan Mohammad, Necmi Biyikli, Saidjafarzoda Ilhom, Yuen H Tsang, Mohammad I Hossain
Research Type: Poster/Presentation

Electro-optical characteristics of low-temperature plasma-assisted ALD-grown InN films as active layers in visible/near-IR photodetectors
2019
Deepa Shukla, Adnan Mohammad, Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Plasma-enhanced atomic layer deposition of vanadium dioxide (VO2) using TEMAV and oxygen plasma
2019
Necmi Biyikli, Saidjafarzoda Ilhom, Adnan Mohammad, Deepa Shukla, Helena Silva
Research Type: Poster/Presentation

Role of Hydrogen Radicals in the Surface Reactions of Trimethyl-Indium (TMI) with Ar/N2 Plasma in Hollow-Cathode Plasma-Assisted ALD
2019
Saidjafarzoda Ilhom, Necmi Biyikli, Deepa Shukla, Brian G Willis, Adnan Mohammad
Research Type: Poster/Presentation

In-situ ellipsometric analysis of plasma-assisted ALD-grown stoichiometric and crystalline AlN films
2019
Saidjafarzoda Ilhom, Brian G Willis, Blaine Johs, Deepa Shukla, Adnan Mohammad, Necmi Biyikli, Ali K Okyay
Research Type: Poster/Presentation