Brian G. Willis
Professor/Chem and Biomolecular Engr

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Scholarly Contributions

95 Scholarly Contributions

60
Poster/Presentations
29
Journal Articles
5
Conference Proceedings
1
Patent and Intellectual Property
Analyzing Self-limiting Surface Reaction Mechanisms of Metal Alkyl Precursors and Nitrogen Plasma Species: Real-time In-situ Ellipsometric Monitoring of III-nitride Plasma-ALD Processes
2019
Brian G Willis, Blaine Johs, Ali K Okyay, Necmi Biyikli, Deepa Shukla, Adnan Mohammad
Research Type: Poster/Presentation

Impact of Operating Parameters on Precursor Separation in "Air Hockey" Spatial Atomic Layer Deposition Reactor
2019
Brian G Willis, John Grasso
Research Type: Poster/Presentation

In-situ ellipsometric analysis of plasma-assisted ALD-grown stoichiometric and crystalline AlN films
2019
Saidjafarzoda Ilhom, Brian G Willis, Blaine Johs, Deepa Shukla, Adnan Mohammad, Necmi Biyikli, Ali K Okyay
Research Type: Poster/Presentation

Investigating the effect of plasma chemistry on the InOxNx films grown via plasma-enhanced atomic layer deposition
2019
Necmi Biyikli, Adnan Mohammad, Liam Gerety, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

A Nanoparticle-Based Electronic Nose System for Classification of Teas
2019
Tuo Gao, Brian G Willis
Research Type: Poster/Presentation

Impact of substrate and ex-situ/in-situ surface cleaning on plasma-ALD grown AlN films
2019
Adnan Mohammad, Brian G Willis, Sylvester Jung, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Research Type: Poster/Presentation

Chemiresistor Array for Pattern Recognition of Complex Odor
2019
Tuo Gao, Brian G Willis
Research Type: Poster/Presentation

Investigating Plasma Parameters and Influence of Argon to the Crystallinity of GaN Films Grown by Plasma-Assisted ALD
2019
Saidjafarzoda Ilhom, Brian G Willis, Adnan Mohammad, Necmi Biyikli, Deepa Shukla
Research Type: Poster/Presentation

Selectivity Study of Photon-Enhanced Area Selective Atomic Layer Deposition of Plasmonic Nanostructures
2019
Brian G Willis, Chengwu Zhang
Research Type: Poster/Presentation

Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films
2020
Brian G Willis, Necmi Biyikli, Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, John Grasso, Ali K Okyay
Research Type: Journal Article

Understanding the role of rf-power on AlN film properties in hollow-cathode plasma-assisted atomic layer deposition
2020
John Grasso, Brian G Willis, Adnan Mohammad, Necmi Biyikli, Deepa Shukla, Saidjafarzoda Ilhom
Research Type: Journal Article

Optical response of nickel-based superalloy Inconel-718 for applications in additive manufacturing
2020
Ilya Sochnikov, Rainer J Hebert, Pamir Alpay, Brian G Willis, Jason Hancock
Research Type: Journal Article

Crystalline GaN Film Growth at a Thermal Budget Approaching 100C Using Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2020
Saidjafarzoda Ilhom, Necmi Biyikli, Brian G Willis, Adnan Mohammad, Deepa Shukla
Research Type: Poster/Presentation

Understanding the Influence of In-situ Ar-Plasma Annealing Processes on the Film Properties of ALD-Grown AlN Layers
2020
John Grasso, Brian G Willis, Ali K Okyay, Adnan Mohammad, Deepa Shukla, Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Plasma-Enhanced ALD of as-Grown Crystalline VOx and the Evolution of its Phase Structure via Critically Tuned Post-Deposition Annealing Process
2020
Deepa Shukla, Krishna D Joshi, Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad, Brian G Willis, Barrett O Wells
Research Type: Poster/Presentation

Plasma-Assisted Atomic Layer Annealing as a Low-Temperature Technique Enabling Crystalline Growth of β-Ga2O3 Films for Wearable/Flexible Electronics
2020
Deepa Shukla, Adnan Mohammad, Necmi Biyikli, Brian G Willis, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

As-Grown Crystalline beta-Ga2O3 Films via Plasma-Enhanced ALD at Low Substrate Temperatures
2020
John Grasso, Deepa Shukla, Brian G Willis, Ali K Okyay, Necmi Biyikli, Saidjafarzoda Ilhom, Adnan Mohammad
Research Type: Poster/Presentation

Investigating the Role of N2 Plasma Composition on the Atomic Layer Growth of InN Films Using Hollow-Cathode Plasma Source
2020
Saidjafarzoda Ilhom, Brian G Willis, John Grasso, Necmi Biyikli, Deepa Shukla, Adnan Mohammad, Ali K Okyay
Research Type: Poster/Presentation

Towards as-grown Crystalline Cubic Boron Nitride via Low-Temperature Plasma-enhanced Atomic Layer Deposition
2020
Adnan Mohammad, Barrett O Wells, Necmi Biyikli, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Feasibility of Boron Nitride Film Growth at Lower-than 250C Substrate Temperature via Hollow-Cathode Plasma-ALD: In-situ Monitoring of Plasma Composition Effect
2020
Necmi Biyikli, Brian G Willis, Deepa Shukla, Saidjafarzoda Ilhom, Ali K Okyay, John Grasso, Adnan Mohammad
Research Type: Poster/Presentation