Brian G. Willis
Professor/Chem and Biomolecular Engr
Storrs Mansfield
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Scholarly Contributions
95 Scholarly Contributions
Real-time in situ process monitoring and characterization of GaN films grown on Si (100) by low-temperature hollow-cathode plasma-atomic layer deposition using trimethylgallium and N2/H2 plasma
2021
Research Type: Journal Article
Tuning the Structural Properties of Low-Temperature Grown GaN Films via in Situ Ar-Plasma Annealing During Hollow-Cathode Atomic Layer Deposition
2021
Research Type: Poster/Presentation
Low-Temperature Plasma-ALD of Wide and Ultra-Wide Bandgap Semiconductors: Accomplishments and Hurdles to Overcome
2021
Research Type: Poster/Presentation
Hollow Cathode Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide Films: in situ Ellipsometric Monitoring of Film Growth with TEMAV and Oxygen Plasma
2021
Research Type: Poster/Presentation
Atomic Layer Doped Epitaxial β-Ga2O3 Films Grown via Supercycle and Co-dosing Approaches at 240 °C
2022
Research Type: Poster/Presentation
Low-temperature synthesis of crystalline vanadiumoxide films using oxygen plasmas
2023
Research Type: Journal Article
Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
2024
Research Type: Journal Article
The Role of Geometry in Nanoscale Rectennas for Rectification and Energy Conversion
Research Type: Conference Proceedings
Real-Time In Situ Monitoring Atomic Layer Doping Processes for Group-III Doped ZnO Layers—Super- Cycle Versus Co-Dosing Approach
Research Type: Conference Proceedings
Atomic Layer Deposition of SrO: Substrate and Temperature Effects
Research Type: Conference Proceedings
Polynucleotide-functionalized Gold Nanoparticles as Chemiresistive Vapor Sensing Elements
Research Type: Conference Proceedings
Selective-Area Atomic Layer Deposition of Copper Nanostructures for Direct Electro-Optical Solar Energy Conversion
Research Type: Conference Proceedings