Necmi Biyikli
Associate Professor/Electrical and Computer Engr

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Scholarly Contributions

103 Scholarly Contributions

76
Poster/Presentations
26
Journal Articles
1
Conference Proceedings
Monocrystalline III-Nitride Films Grown on Sapphire Substrates at 200 °C via Hollow-Cathode Nitrogen Plasmas
2023
Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Low-Temperature Epitaxy and in-situ Doping of Ultrawide Bandgap Ga2O3 Films via Hollow-Cathode Plasma-ALD
2023
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Optical Emission Spectroscopy Analysis of Self-limiting AlN Growth Process during Low-Temperature Plasma-Assisted ALD
2023
Necmi Biyikli
Research Type: Poster/Presentation

Towards Self-Limiting III-Nitride Epitaxy via Hollow-Cathode
2023
Necmi Biyikli
Research Type: Poster/Presentation

In situ Atomic Layer Doping of Epitaxially Grown β-Ga2O3 Films via Plasma-enhanced ALD at 240 °C
2023
Necmi Biyikli
Research Type: Poster/Presentation

Influence of Metal Precursors on the Low-Temperature Crystalline Vanadium Oxide Synthesis Using Oxygen Plasmas
2023
Necmi Biyikli
Research Type: Poster/Presentation

Hollow-Cathode Plasma-ALD of Titanium Nitride Films Using In-Situ Ellipsometry for Conductivity Analysis
2023
Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Optical and Electrical Device Properties of Plasma-ALD-grown β-Ga2O3
2022
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Low-temperature Synthesis of Crystalline VOx Films via Hollow-Cathode Plasma-Assisted ALD: Impact of Vanadium Precursor
2022
Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Plasma-enhanced atomic layer deposition of crystalline β-Ga2O3 films at low substrate temperatures for low thermal budget
2022
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Low-Temperature Self-Limiting Growth of Cubic Boron Nitride via Hollow-Cathode Plasma-Enhanced Atomic Layer Deposition
2022
Saidjafarzoda Ilhom, Necmi Biyikli, Adnan Mohammad
Research Type: Poster/Presentation

Single crystal growth of GaN films on sapphire using plasma assisted atomic layer deposition
2022
Necmi Biyikli, Deepa Shukla
Research Type: Poster/Presentation

Phase-Transformation of as-Grown Crystalline VOx Films Using Ar-Plasma Annealing During Low-Temperature Hollow-Cathode Plasma-Assisted ALD Monitored via in-Situ Ellipsometry
2022
Necmi Biyikli, Adnan Mohammad
Research Type: Poster/Presentation

In situ Atomic Layer Doping Coupled Low-temperature Epitaxial Growth of β-Ga2O3 Films via Plasma-enhanced ALD
2022
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Self-Limiting Growth of Monocrystalline GaN Films via Sequential Triethylgallium and Forming Gas Plasma Cycles in Hollow-Cathode Plasma-ALD Reactor
2022
Deepa Shukla, Necmi Biyikli
Research Type: Poster/Presentation

Low-temperature Epitaxy of β-Ga2O3 Films via Hollow-cathode Plasma-assisted ALD
2022
Saidjafarzoda Ilhom, Necmi Biyikli
Research Type: Poster/Presentation

Low-Temperature Epitaxial Growth and in Situ Atomic Layer Doping of β-Ga2O3 Films via Plasma-Enhanced ALD
2022
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Hole Transport Properties of Nickel Oxide Films Grown via Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
2022
Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Atomic Layer Doped Epitaxial β-Ga2O3 Films Grown via Supercycle and Co-dosing Approaches at 240 °C
2022
Brian G Willis, Necmi Biyikli, Saidjafarzoda Ilhom
Research Type: Poster/Presentation

Plasma-Enhanced Atomic Layer Deposition of Crystalline NiO Films Using Nickelocene and O2 Plasmas for BEOL p-Channel Devices
2022
Dominic Zacharzewski, Sofia Abdari, Necmi Biyikli, Saidjafarzoda Ilhom, Peter Chardavoyne, Martin Niemiec
Research Type: Poster/Presentation